Lee, D. W. and Kang, J. H. and Gysin, U. and Rast, S. and Meyer, E. and Despont, M. and Gerber, C.. (2005) Fabrication and evaluation of single-crystal silicon cantilevers with ultra-low spring constants. Journal of micromechanics and microengineering, Vol. 15, H. 11. pp. 2179-2183.
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Official URL: http://edoc.unibas.ch/dok/A5262116
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Abstract
We successfully fabricated single-crystal silicon cantilevers with spring constants as low as 10(-5) N m(-1) for use in magnetic resonance force microscopy applications. The fabricated ultra-thin silicon cantilevers had thicknesses ranging from 200 to 400 nm, lengths ranging from 340 to 450 mu m and a width of 5 mu m. We characterized their force sensitivity in the vacuum range from ambient pressure to 10(-3) Pa and the temperature range from 15 to 300 K. A minimum value is observed for the internal friction, Q(-1), at 160 K, which corresponds to an activation peak due to phonon scattering by atomic-scale defects. The best force sensitivity was achieved at 20 K, where it was increased by a factor of 10 as compared to that observed at room temperature.
Faculties and Departments: | 05 Faculty of Science > Departement Physik > Physik > Nanomechanik (Meyer) |
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UniBasel Contributors: | Meyer, Ernst |
Item Type: | Article, refereed |
Article Subtype: | Research Article |
Publisher: | IOP |
ISSN: | 0960-1317 |
Note: | Publication type according to Uni Basel Research Database: Journal article |
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Identification Number: | |
Last Modified: | 22 Mar 2012 14:27 |
Deposited On: | 22 Mar 2012 13:58 |
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