Gutmannsbauer, W. and Hug, H. J. and Meyer, E.. (1996) Scanning probe microscopy for nanometer inspections and industrial applications. Microelectronic engineering, Vol. 32, H. 1-4. pp. 389-409.
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Official URL: http://edoc.unibas.ch/dok/A5839470
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Faculties and Departments: | 05 Faculty of Science > Departement Physik > Physik > Nanomechanik (Meyer) |
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UniBasel Contributors: | Meyer, Ernst |
Item Type: | Article, refereed |
Article Subtype: | Research Article |
Publisher: | North-Holland |
ISSN: | 0167-9317 |
Note: | Publication type according to Uni Basel Research Database: Journal article |
Identification Number: |
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Last Modified: | 14 Sep 2012 07:18 |
Deposited On: | 14 Sep 2012 06:43 |
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